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"Dynamic Modeling, Simulation, and Experimental Verification of a Wafer ..."

Yunbo He et al. (2019)

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DOI: 10.1109/ACCESS.2019.2909657

access: open

type: Journal Article

metadata version: 2022-12-06

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  dblp key:
  - journals/access/HeMCGYZCCT19
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  persistent URL:
  - https://dblp.org/rec/journals/access/HeMCGYZCCT19
Yunbo He, Xiquan Mai, Chengqiang Cui, Jian Gao, Zhijun Yang, Kai Zhang, Xun Chen, Yun Chen, Hui Tang:
Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control. IEEE Access 7: 47143-47153 (2019)

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