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"Combined Feedforward Control and Disturbance Rejection Control Design for ..."

Mingsheng Cao, Yumeng Bo, Huibin Gao (2020)

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DOI: 10.1109/ACCESS.2020.3028379

access: open

type: Journal Article

metadata version: 2020-10-20

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Mingsheng Cao, Yumeng Bo, Huibin Gao:
Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning. IEEE Access 8: 181224-181232 (2020)

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