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"A Holistic Self-Calibration Approach for Determination of ..."

Chuxiong Hu et al. (2013)

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DOI: 10.1109/TIM.2012.2215116

access: closed

type: Journal Article

metadata version: 2020-09-02

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Chuxiong Hu, Yu Zhu, Jinchun Hu, Dengfeng Xu, Ming Zhang:
A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error. IEEE Trans. Instrum. Meas. 62(2): 483-494 (2013)

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