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"Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations."
Tae-Sun Yu, Hyun-Jung Kim, Tae-Eog Lee (2018)
- Tae-Sun Yu, Hyun-Jung Kim, Tae-Eog Lee:
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations. IEEE Trans Autom. Sci. Eng. 15(2): 705-716 (2018)
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