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"Response Policies to Process Module Failure in Single-Arm Cluster Tools ..."

Yan Qiao et al. (2015)

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DOI: 10.1109/TASE.2014.2312823

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - https://dblp.org/rec/journals/tase/QiaoPWZ15
Yan Qiao, ChunRong Pan, Naiqi Wu, MengChu Zhou:
Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints. IEEE Trans Autom. Sci. Eng. 12(3): 1125-1139 (2015)

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