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"A Sampling Decision System for Virtual Metrology in Semiconductor ..."

Daniel Kurz, Cristina De Luca, Jürgen Pilz (2015)

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DOI: 10.1109/TASE.2014.2360214

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - https://dblp.org/rec/journals/tase/KurzLP15
Daniel Kurz, Cristina De Luca, Jürgen Pilz:
A Sampling Decision System for Virtual Metrology in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 12(1): 75-83 (2015)

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