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"Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic ..."

Shuo Chen, Zheng You (2016)

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DOI: 10.3390/S16050603

access: open

type: Journal Article

metadata version: 2018-11-14

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Shuo Chen, Zheng You:
Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis. Sensors 16(5): 603 (2016)

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