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"Modeling of contact behavior between polishing pad and workpiece surface."

Fritz Klocke, Olaf Dambon, Richard Zunke (2008)

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DOI: 10.1007/S11740-007-0059-Z

access: closed

type: Journal Article

metadata version: 2020-08-06

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  dblp key:
  - journals/peng/KlockeDZ08
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  - https://dblp.org/rec/journals/peng/KlockeDZ08
Fritz Klocke, Olaf Dambon, Richard Zunke:
Modeling of contact behavior between polishing pad and workpiece surface. Prod. Eng. 2(1): 9-14 (2008)

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