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"Assessment of dielectric charging in electrostatically driven MEMS ..."

Usama Zaghloul et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.027

access: closed

type: Journal Article

metadata version: 2022-10-02

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Usama Zaghloul, Matroni Koutsoureli, H. Wang, Fabio Coccetti, George J. Papaioannou, Patrick Pons, Robert Plana:
Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques. Microelectron. Reliab. 50(9-11): 1615-1620 (2010)

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