Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Defects in silicon oxynitride gate dielectric films."

Hei Wong, V. A. Gritsenko (2002)

> Home

Details and statistics

DOI: 10.1016/S0026-2714(02)00005-7

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/WongG02
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/WongG02
Hei Wong, V. A. Gritsenko:
Defects in silicon oxynitride gate dielectric films. Microelectron. Reliab. 42(4-5): 597-605 (2002)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.