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"Processing procedures for the realization of fine structured channel ..."

Walter Smetana et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.02.023

access: closed

type: Journal Article

metadata version: 2020-02-22

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Walter Smetana, Bruno Balluch, Günther Stangl, Sigrid Lüftl, Sabine Seidler:
Processing procedures for the realization of fine structured channel arrays and bridging elements by LTCC-Technology. Microelectron. Reliab. 49(6): 592-599 (2009)

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