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"Stress evolution in the metal layers of TSVs with Bosch scallops."

Anderson Pires Singulani, Hajdin Ceric, Siegfried Selberherr (2013)

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DOI: 10.1016/J.MICROREL.2013.07.132

access: closed

type: Journal Article

metadata version: 2021-10-14

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Anderson Pires Singulani, Hajdin Ceric, Siegfried Selberherr:
Stress evolution in the metal layers of TSVs with Bosch scallops. Microelectron. Reliab. 53(9-11): 1602-1605 (2013)

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