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"Reliability aspects of Hf-based capacitors: Breakdown and trapping effects."

Rainer Duschl et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.017

access: closed

type: Journal Article

metadata version: 2021-10-31

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Rainer Duschl, Martin Kerber, A. Avellan, S. Jakschik, Uwe Schroeder, S. Kudelka:
Reliability aspects of Hf-based capacitors: Breakdown and trapping effects. Microelectron. Reliab. 47(4-5): 497-500 (2007)

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