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"A constitutive single crystal model for the silicon mechanical behavior: ..."

Florian Cacho et al. (2007)

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DOI: 10.1016/J.MICROREL.2006.09.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Florian Cacho, S. Orain, G. Cailletaud, H. Jaouen:
A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectron. Reliab. 47(2-3): 161-167 (2007)

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