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"Dielectric thinning model applied to metal insulator metal capacitors with ..."

K.-H. Allers et al. (2009)

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DOI: 10.1016/J.MICROREL.2009.07.027

access: closed

type: Journal Article

metadata version: 2020-02-22

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K.-H. Allers, Josef Böck, S. Boguth, K. Goller, Herbert Knapp, Rudolf Lachner:
Dielectric thinning model applied to metal insulator metal capacitors with Al₂O₃ dielectric. Microelectron. Reliab. 49(12): 1520-1528 (2009)

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