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"Modelling and analysis of pad surface topography and slurry particle size ..."

Changxue Wang, Peter Sherman, Abhijit Chandra (2005)

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DOI: 10.1504/IJMTM.2005.007700

access: closed

type: Journal Article

metadata version: 2020-06-04

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Changxue Wang, Peter Sherman, Abhijit Chandra:
Modelling and analysis of pad surface topography and slurry particle size distribution effects on material removal rate in chemical mechanical planarisation. Int. J. Manuf. Technol. Manag. 7(5/6): 504-529 (2005)

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