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ORCID"A 2 x 2 array of the multi-degree-of freedom ultrasonic actuators for a ..."
Yasuyuki Goda et al. (2009)
- Yasuyuki Goda, Daisuke Koyama
, Kentaro Nakamura, Sadayuki Ueha:
A 2 x 2 array of the multi-degree-of freedom ultrasonic actuators for a low profile two-dimensional sliding table. IEICE Electron. Express 6(6): 317-321 (2009)
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