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"Study of process of HSQ in electron beam lithography."

Min Zhao et al. (2010)

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DOI: 10.1109/NEMS.2010.5592584

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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  dblp key:
  - conf/nems/ZhaoCXLN10
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  - https://dblp.org/rec/conf/nems/ZhaoCXLN10
Min Zhao, Baoqin Chen, Changqing Xie, Ming Liu, Jiebing Nie:
Study of process of HSQ in electron beam lithography. NEMS 2010: 1021-1024

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