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"A novel method to fabricate silicon nanopore arrays."

T. Deng et al. (2013)

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DOI: 10.1109/NEMS.2013.6559828

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-08

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  - https://dblp.org/rec/conf/nems/DengZCL13
T. Deng, C. Zhao, J. Chen, Zewen Liu:
A novel method to fabricate silicon nanopore arrays. NEMS 2013: 714-717

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