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"Monolithic MEMS resonator based pressure sensor and readout design."

Po-Chun Chuang, Kuei-Ann Wen (2016)

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DOI: 10.1109/ISOCC.2016.7799719

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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  dblp key:
  - conf/isocc/ChuangW16
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  - https://dblp.org/rec/conf/isocc/ChuangW16
Po-Chun Chuang, Kuei-Ann Wen:
Monolithic MEMS resonator based pressure sensor and readout design. ISOCC 2016: 17-18

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