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"Residual Vibration Analysis and Suppression for SCARA Robot Arm in ..."

Wei Min Tao et al. (2006)

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DOI: 10.1109/IROS.2006.282610

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Wei Min Tao, Ming-Jun Zhang, Michael Liu, Xiao Ping Yun:
Residual Vibration Analysis and Suppression for SCARA Robot Arm in Semiconductor Manufacturing. IROS 2006: 5153-5158

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