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"Robust control of rapid thermal processes applied to vapor deposition ..."

Stanislav Aranovskiy et al. (2014)

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DOI: 10.1109/ICUMT.2014.7002165

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Stanislav Aranovskiy, Aleksandr A. Kapitonov, Alexey A. Bobtsov, Anton A. Pyrkin, Evgeny Zavarin, Denis Davydov, Romeo Ortega:
Robust control of rapid thermal processes applied to vapor deposition processing. ICUMT 2014: 578-583

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