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"Real-time control policy for single-arm cluster tools with residency time ..."

Yan Qiao, Naiqi Wu, MengChu Zhou (2012)

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DOI: 10.1109/ICNSC.2012.6204887

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Yan Qiao, Naiqi Wu, MengChu Zhou:
Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net. ICNSC 2012: 34-39

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