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"Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by ..."

Linke Jian et al. (2003)

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DOI: 10.1109/ICMENS.2003.1221957

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  dblp key:
  - conf/icmens/JianLSBDG03
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  persistent URL:
  - https://dblp.org/rec/conf/icmens/JianLSBDG03
Linke Jian, Bernd Loechel, Heinz-Ulrich Scheunemann, Martin Bednarzik, Yohannes M. Desta, Jost Goettert:
Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography. ICMENS 2003: 10-14

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