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"High-density capacitors for SiP and SoC applications based on ..."

Wenke Weinreich et al. (2013)

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DOI: 10.1109/ICICDT.2013.6563342

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-04

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Wenke Weinreich, Matthias Rudolph, Johannes Koch, Jan Paul, Konrad Seidel, Stefan Riedel, Jonas Sundqvist, Katja Steidel, Manuela Gutsch, Volkhard Beyer, Christoph Hohle:
High-density capacitors for SiP and SoC applications based on three-dimensional integrated metal-isolator-metal structures. ICICDT 2013: 227-230

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