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"Design driven patterning optimizations for low K1 lithography."

Kanak B. Agarwal, Shayak Banerjee (2012)

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DOI: 10.1109/ICICDT.2012.6232834

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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  - https://dblp.org/rec/conf/icicdt/AgarwalB12
Kanak B. Agarwal, Shayak Banerjee:
Design driven patterning optimizations for low K1 lithography. ICICDT 2012: 1-4

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