"Dynamic Maintenance in semiconductor manufacturing using Bayesian networks."

Daniel Kurz, Johannes Kaspar, Jürgen Pilz (2011)

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DOI: 10.1109/CASE.2011.6042404

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Daniel Kurz, Johannes Kaspar, Jürgen Pilz:
Dynamic Maintenance in semiconductor manufacturing using Bayesian networks. CASE 2011: 238-243

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