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"Inverse RIE micro-loading in deep etching of silicon via array."

Xubo Wang, Qing Wang, Jia Zhou (2019)

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DOI: 10.1109/ASICON47005.2019.8983664

access: closed

type: Conference or Workshop Paper

metadata version: 2020-02-12

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  dblp key:
  - conf/asicon/WangWZ19
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Xubo Wang, Qing Wang, Jia Zhou:
Inverse RIE micro-loading in deep etching of silicon via array. ASICON 2019: 1-3

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