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"Deep trench junction termination employing variable-K dielectric for high ..."

Huan Li, Xingbi Chen (2015)

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DOI: 10.1109/ASICON.2015.7517157

access: closed

type: Conference or Workshop Paper

metadata version: 2018-07-17

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Huan Li, Xingbi Chen:
Deep trench junction termination employing variable-K dielectric for high voltage devices. ASICON 2015: 1-4

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