"Wafer fabrication: 300mm wafer fabrication line simulation model."

Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair (2002)

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DOI: 10.1109/WSC.2002.1166403

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Sameer T. Shikalgar, David Fronckowiak, Edward A. MacNair:
Wafer fabrication: 300mm wafer fabrication line simulation model. WSC 2002: 1365-1368

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