"Impact of control plan design on tool risk management: a simulation study ..."

Gloria Rodríguez-Verján, Stéphane Dauzère-Pérès, Jacques Pinaton (2011)

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DOI: 10.1109/WSC.2011.6147905

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  - https://dblp.org/rec/conf/wsc/Rodriguez-VerjanDP11
Gloria Rodríguez-Verján, Stéphane Dauzère-Pérès, Jacques Pinaton:
Impact of control plan design on tool risk management: a simulation study in semiconductor manufacturing. WSC 2011: 1918-1925

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