"Process equipment modeling: resident-entity based simulation of batch ..."

Nirmal Govind, David Fronckowiak (2003)

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DOI: 10.1109/WSC.2003.1261582

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Nirmal Govind, David Fronckowiak:
Process equipment modeling: resident-entity based simulation of batch chamber tools in 300mm semiconductor manufacturing. WSC 2003: 1398-1405

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