"Simulation analysis on the impact of furnace batch size increase in a ..."

Boon-Ping Gan et al. (2006)

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DOI: 10.1109/WSC.2006.322961

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/wsc/GanLQHCK06
Boon-Ping Gan, Peter Lendermann, Kelvin Paht Te Quek, Bart van der Heijden, Chen Chong Chin, Choon Yap Koh:
Simulation analysis on the impact of furnace batch size increase in a deposition loop. WSC 2006: 1821-1828

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