"Machine qualification management for a semiconductor back-end facility."

Mengying Fu et al. (2010)

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DOI: 10.1109/WSC.2010.5678944

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Mengying Fu, Moeed Haghnevis, Ronald G. Askin, John W. Fowler, Muhong Zhang:
Machine qualification management for a semiconductor back-end facility. WSC 2010: 2486-2492

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