"A literature review on variability in semiconductor manufacturing: The ..."

Kean Dequeant et al. (2016)

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DOI: 10.1109/WSC.2016.7822298

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Kean Dequeant, Philippe Vialletelle, Pierre Lemaire, Marie-Laure Espinouse:
A literature review on variability in semiconductor manufacturing: The next forward leap to Industry 4.0. WSC 2016: 2598-2609

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