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"Systematic applications of multivariate analysis to monitoring of ..."

An-Guo Chao et al. (2008)

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DOI: 10.1109/WSC.2008.4736338

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  dblp key:
  - conf/wsc/ChaoTWJL08
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  persistent URL:
  - https://dblp.org/rec/conf/wsc/ChaoTWJL08
An-Guo Chao, S. T. Tseng, David Shan-Hill Wong, Shi-Shang Jang, Shui-Pin Lee:
Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing. WSC 2008: 2330-2334

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