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"First Demonstration of BEOL-Compatible MFMIS Fe-FETs with 3D Multi-Fin ..."

Xiaolin Wang et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185306

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-19

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Xiaolin Wang, Zijie Zheng, Qiwen Kong, Leming Jiao, Kaizhen Han, Chen Sun, Zuopu Zhou, Long Liu, Yuye Kang, Gan Liu, Dong Zhang, Xiao Gong:
First Demonstration of BEOL-Compatible MFMIS Fe-FETs with 3D Multi-Fin Floating Gate: In-situ ALD-deposited MFM, LCH of 50 nm, > 2×10⁹ Endurance, and 58.3% Area Saving. VLSI Technology and Circuits 2023: 1-2

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