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"Record Transconductance in Leff~30 nm Self-Aligned Replacement Gate ETSOI ..."
Li-Chen Wang et al. (2023)
- Li-Chen Wang, W. Li, Nirmaan Shanker, Suraj S. Cheema, Shang-Lin Hsu, S. Volkman, U. Sikder, C. Garg, J.-H. Park, Y.-H. Liao, Yen-Kai Lin, Chenming Hu, Sayeef S. Salahuddin:
Record Transconductance in Leff~30 nm Self-Aligned Replacement Gate ETSOI nFETs Using Low EOT Negative Capacitance HfO2-ZrO2 Superlattice Gate Stack. VLSI Technology and Circuits 2023: 1-2
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