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"Implications of Halo Implant Shadowing and Backscattering from Mask Layer ..."
H. C. Srinivasaiah (2012)
- H. C. Srinivasaiah:
Implications of Halo Implant Shadowing and Backscattering from Mask Layer Edges on Device Leakage Current in 65nm SRAM. VLSI Design 2012: 412-417
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