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"New Methodology for Evaluating Minority Carrier Lifetime for Process ..."

Kuniyuki Kakushima et al. (2018)

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DOI: 10.1109/VLSIC.2018.8502399

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-12

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Kuniyuki Kakushima, Takuya Hoshii, M. Watanabe, N. Shizyo, K. Furukawa, Takuya Saraya, T. Takakura, K. Itou, M. Fukui, S. Suzuki, Ken Takeuchi, Iriya Muneta, Hitoshi Wakabayashi, Y. Numasawa, Atsushi Ogura, Shinichi Nishizawa, Kazuo Tsutsui, Toshiro Hiramoto, Hiromichi Ohashi, Hiroshi Iwai:
New Methodology for Evaluating Minority Carrier Lifetime for Process Assessment. VLSI Circuits 2018: 105-106

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