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"Optical Quality Control for Adaptive Polishing Processes."

Marc Kassubeck et al. (2020)

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DOI: 10.1109/SSIAI49293.2020.9094615

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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  - conf/ssiai/KassubeckMMKCDM20
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  - https://dblp.org/rec/conf/ssiai/KassubeckMMKCDM20
Marc Kassubeck, Talash Malek, Moritz Mühlhausen, Moritz Kappel, Susana Castillo, Marc-André Dittrich, Marcus A. Magnor:
Optical Quality Control for Adaptive Polishing Processes. SSIAI 2020: 90-94

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