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"Optimization of 3D Stacked Nanosheets in 5nm Gate-all-around Transistor ..."

Anil Kumar Gundu, Volkan Kursun (2021)

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DOI: 10.1109/SOCC52499.2021.9739517

access: closed

type: Conference or Workshop Paper

metadata version: 2022-03-30

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Anil Kumar Gundu, Volkan Kursun:
Optimization of 3D Stacked Nanosheets in 5nm Gate-all-around Transistor Technology. SoCC 2021: 25-28

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