"Timed Petri net models of cluster tools."

Wlodek M. Zuberek (2000)

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DOI: 10.1109/ICSMC.2000.884468

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type: Conference or Workshop Paper

metadata version: 2021-10-14

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Wlodek M. Zuberek:
Timed Petri net models of cluster tools. SMC 2000: 3063-3068

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