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"Neural Net Based Prognostics for an Industrial Semiconductor Fabrication ..."

Victor M. Stone, Mehrdad Jamshidi (2005)

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DOI: 10.1109/ICSMC.2005.1571361

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Victor M. Stone, Mehrdad Jamshidi:
Neural Net Based Prognostics for an Industrial Semiconductor Fabrication System. SMC 2005: 1512-1517

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