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"A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing ..."

Stefan Schrunner et al. (2019)

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DOI: 10.1109/SMC.2019.8914309

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Stefan Schrunner, Anna Jenul, Michael Scheiber, Anja Zernig, Andre Kästner, Roman Kern:
A Health Factor for Process Patterns Enhancing Semiconductor Manufacturing by Pattern Recognition in Analog Wafermaps. SMC 2019: 3555-3560

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