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"A review on medium term capacity planning for semiconductor wafer fabrication."

Na Geng, Zhibin Jiang (2007)

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DOI: 10.1109/ICSMC.2007.4413714

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Na Geng, Zhibin Jiang:
A review on medium term capacity planning for semiconductor wafer fabrication. SMC 2007: 680-684

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