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"A new method for the analysis of movement dependent parasitics in full ..."

Axel Hald et al. (2017)

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DOI: 10.1109/SMACD.2017.7981568

access: closed

type: Conference or Workshop Paper

metadata version: 2018-08-29

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  dblp key:
  - conf/smacd/HaldSHSL17
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Axel Hald, Johannes Seelhorst, Pekka Herzogenrath, Jürgen Scheible, Jens Lienig:
A new method for the analysis of movement dependent parasitics in full custom designed MEMS sensors. SMACD 2017: 1-4

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