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"Accurate and robust geometric modeling for simulation of IC and MEMS ..."

Tushar Udeshi (2005)

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DOI: 10.1145/1060244.1060273

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Tushar Udeshi:
Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes. Symposium on Solid and Physical Modeling 2005: 257-266

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