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"Multi-Scale Active Vibration Suppression Technology for Nanometer-Order ..."

Jun Etoh, Hironori Ogawa, Hiroki Takahashi (2024)

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DOI: 10.1109/SII58957.2024.10417535

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-20

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Jun Etoh, Hironori Ogawa, Hiroki Takahashi:
Multi-Scale Active Vibration Suppression Technology for Nanometer-Order System. SII 2024: 1543-1548

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