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"High Temperature Operating Lifetime Test on piezo-MEMS devices."

Maria Fortuna Bevilacqua et al. (2021)

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DOI: 10.1109/RTSI50628.2021.9597262

access: closed

type: Conference or Workshop Paper

metadata version: 2021-11-19

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Maria Fortuna Bevilacqua, Valeria Casuscelli, Sonia Costantini, Paolo Ferrari, Immacolata Pedaci:
High Temperature Operating Lifetime Test on piezo-MEMS devices. RTSI 2021: 452-456

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